Performance
- -Available ranges: 0-100 sccm, 0-1000 sccm, and 0-20 slpm (see Part Numbers)
- -Operating range (Turndown ratio): 200:1 (1, 20 and 50 slpm) or 100:1 (100 sccm)
- -Calibration accuracy, NIST-traceable: +/- (1.5% of the reading + 0.5% of the full-scale range)
- -Repeatability: 0.5% of the full-scale range
- -Typical control response time constant: 100 ms (adjustable with PD tuning)
- -Warm-up time: 70 ms to full accuracy spec