Performance
- -Available ranges: max 0-1000 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
- -Flow measurement range: 0.01% – 100% of full scale.
- -Standard accuracy calibration, NIST-traceable: +/- (0.8% of the reading + 0.2% of the full-scale range)
- -Optional high-accuracy calibration, NIST-traceable: +/- (0.4% of the reading + 0.2% of the full-scale range)
- -Repeatability: 0.2% of the full-scale range
- -Typical measurement response time constant: 5-10 ms
- -No warm-up time required